INVESTIGATION OF MICRO-ELECTRO MECHANICAL SYSTEM (MEMS) DEVICES FOR HARVESTING ENERGY

Abstract

Every machine vibrates and emits noise. This is unused energy that, with an appropriate mechanism, can be returned to the system. Utilizing an array of piezoelectric micro electromechanical systems micro-electro mechanical system (MEMS) devices to harvest this otherwise wasted energy; it is possible to improve the efficiency of any number of mechanical devices. Piezoelectricity is the mechanism by which certain crystalline structures generate electric potential when under strain, or, conversely, deform when subjected to an electric potential. It is this first effect that is important to this application. Though each micro-electro mechanical system (MEMS) device will generate a very small amount of power, a 1 m2 area can contain an array of millions of these devices. Energy harvesting, conservation, and efficiency are the universal application of these devices makes them ideal for any expeditionary platform, such as ships, aircraft, and automobiles. This project work designs and tests the first generations of acoustic and vibrational piezoelectric micro-electro mechanical system (MEMS) devices; including time-dependent finite element models, microfabrication processes, and the initial attempts at characterization and optimization.